FIB-SEM - Zeiss Auriga 40 CrossBeam (Irchel)
The focused ion beam-scanning electron microscope (FIB-SEM) Auriga 40 is a multi-approach instrument to investigate sample volume at nanoscale resolution. The ATLAS 3D package, especially dedicated for nanotomography, allows generation of 3D stacks up to 32 k x 32 k pixels.
Location
University Zurich, Irchel Campus, Room Y42-F-70.
Training Request
Follow this link to apply for an introduction to the microscope.
Technical Specifications
Electron and ion columns
Gemini Zeiss column with resolution of 1 nm at 15 kV and 1.9 nm at 1 kV. Magnification range: 12 x -1000 kx. Probe current 4 pA - 20 nA. Acceleration voltage: 0.1 - 30 kV. Emitter: Schottky field emitter.
Cobra Zeiss column with resolution of less than 2.5 nm at 30 kV. Magnification range: 300 x -500 kx. Probe current 1 pA - 50 nA. Acceleration voltage: 1 - 30 kV. Emitter: Ga liquid metal ion source.
Detector Systems
In-lens: high efficiency annular type SE detector
Chamber: Everhart-Thornley type SE detector
In-lens: EsB detector with filtering grid for BSE detection, filtering voltage 0 -15000 V
STEM detector for TEM like imaging
Accessories
Single needle GIS (Pt)
Stage: 6-axissuper eucentric, all motorized stage
Airlock system for fast and efficent sample transfer
Leica VCT cryo transfer system and cryo stage for milling and imaging at temperature down to - 160°C including preparation device Leica BAF060 for freeze-fracturing and coating.
System controls
Integrated SmartSEM user interface for standard applications
Nanopatterning and Visualization engine (NPVE) package allows beam control and large field of view imaging
Literature and Links
Responsible Persons
If you have questions about the device please contact the responsible person.
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