E-beam coater - Bal-tec MED 020 (Irchel)

The Bal-tec coater MED 020 is a versatile high-vacuum coating device, primarily set-up for electron beam evaporation (carbon, carbon /platinum) and low-angle rotary shadowing. The system can also be used as sputtering device or for glow-discharging.

University Zurich, Irchel Campus, Room Y42-H-90

Follow this link to apply for an introduction.

Body

Oil-free high-vacuum system equipped with a membrane and a turbo pump.

Accessories

Two electron beam evaporation guns dedicated for carbon or carbon/platinum evaporation.

Sputter coating head for sputtering of a variety of materials (Pt, Au, Au/Pd, Cr, W)

Glowdischarge ring for rendering specimens hydrophilic.

Quartz layer measuring device for measuring layer thickness.

Responsible Persons

If you have questions about the device please contact the responsible person.

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