Sputter coater - Safematic CCU-010 (Irchel)

The Safematic CCU-010 is a high-vacuum sputter coating device. Produced 2015.

University Zurich, Irchel Campus, Room Y42-H-90

Follow this link to apply for an introduction to the system.

Body

Membrane pump / turbo molecular pump operated high vacuum system.

Accessories

Metal coating of samples by sputtering. Planetary drive stage for uniform coating of highly fissured specimen surfaces. Sputtering with gold, platinum, chromium, tungsten, ITO, molybdenum and more.

Planetary stage for uniform coating of highly corrugated samples.

Quartz layer measuring device for measuring layer thickness.

Responsible Persons

If you have questions about the device please contact the responsible person.

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